New developments of the instrumented indentation testK. Herrmann Physikaliseh-Teehnisehe Bundesanstalt Braunscheig, GermanyAbstract:An advance of the instrumented indentation test （IIT） in recent years has been introduced in this work. It indicates a metrological challenge in the nano range-determination of hardness and modulus on ultrathin layers t〈10 nm and of very hard layers t~100 nm. Substitution of micro Vickers test by IIT enables signifi- cant reduction of measurement uncertainty and automatization. IIT in nano and micro ranges provides manifold applications for microelectronics, MEMS, technical optics, etc.[著者文摘]
Key words:indentation, the instrumented indentation test （IIT） ; uncertainty; metrology
